Protection Gate Valve
feature | ・ triple prevention type ・valve controller (1CH～4CH) ・application : process with by product such as powder, and gas in semiconductor line prevent back stream |
Operating | pneumatic |
| Flange size | 1.5" ～ 10" |
| Flage type | ISO、 NW |
| Feedthrough | welded bellows |
| Gate seal | FKM O-ring / etc |
| Bonnet seal | FKM O-ring / etc |
| Response time | ≤ 0.3sec |
| Operating pressure range | 1x10-10 torr to 1.4 bar |
| Differential pressure | ≤ 1.4 bar |
| Leak rate | ≺ 1x10-10 torr l/sec |
| Cycles until first service | 200,000 |
| Temperature for Valve body | ≤ 200℃ |
| Temperature for Actuator | ≤ 80℃ |
| Bake temperature | ≤ 150℃ |
| Material | SUS304、 AL6061 anodizing |
| Mounting position | Any |
| Operating pressure (N2) | 4～7kgf/cm2 |
