feature | ・ multi position function ・ equipment can read valve state through connet to 9pin D-Sub of the valve ・manual and pneumatic valve combination ・ Applicaions :any other process that requires pressure control |
Operating | Pneumatic (control using adjuster) |
| Flange size | 2.5" ~ 12" |
| Flage type | ISO、 JIS、 ASA、 CF |
| Feedthrough | welled bellows |
| Gate seal | FKM O-ring / etc |
| Bonnet seal | FKM O-ring / etc |
| Response time | ≤ 2sec |
| Operating pressure range | 1x10-10 torr to 1.4 bar |
| Differential pressure | 1.5" ~ 14" : ≤ 1.4 bar 16" ~ 22" : ≤ 1 bar |
| Leak rate | ≺ 1x10-10 torr l/sec |
| Cycles until first service | 200,000 |
| Temperature for Valve body | ≤ 200℃ |
| Temperature for Actuator | ≤ 80℃ |
| Bake temperature | ≤ 150℃ |
| Material | SUS304、 AL6061 anodizing |
| Mounting position | Any |
| Operating pressure | 4~7kgf/cm2 |


