UHV Gate Valve
Specification
| GATE SEAL TYPE | UHV Gate Valve | Differential Pressure on the Gate | 1.5”~6” : ≤ 1400mbar / 8”~14” ≤ 1200mbar |
|---|---|---|---|
| Operation | Manual/Pneumatic | Leak rate | 1 × 10-9 mbar ℓ/sec |
| Flange Size (ID) | 1.5" ~ 12" | Cycles until First Service | 200,000 |
| Flange Type | CF | Temperature for Valve Body | ≤ 250℃ |
| Feedthrough | Welded Bellows(AM350 or STS316L) | Temperature for Actuator | ≤ 150℃ |
| Gate Seal | Viton O-ring/Kalrez O-ring/EPDM | Temperature for Position indicator | ~ 150℃ |
| Bonnet Seal | Cu Gasket | Materials | Body (Stainless Steel304 or 316L) Actuator (AI 6061 Anodizing) |
| Response Time | ≤ 2 Sec | Mounting Position | Any |
| Operate Pressure Range | 1.5”~6” : 1 x 10-10 mbar to 1400 mbar 8”~14” : 1 x 10-10 mbar to 1200 mbar | Operating Pressure(N2) | 4 ~ 7 bar |
| Differential Pressure at Opening | ≤ 30mbar |
