UHV Gate Valve
feature | ・low particle by ceramic ball mechnism ・easy maintenance using Repair parts kit ・applications : pump isolation |
Operating | Manual / Pneumatic |
| Flange size | 1.5" ～ 14" |
| Flange type | CF |
| feedthrough | welded bellows |
| Gate seal | FKM O-ring / etc |
| Bonnet seal | cupper gasket |
| Response time | ≤ 2sec |
| Operating pressure range | 1x10-10 torr to 1.4 bar |
| Differential pressure | ≤ 1 bar |
| Leak rate | ≺ 1x10-10 torr l/sec |
| Cycles until first service | 200,000 |
| Temperature for Valve body | ≤ 200℃ |
| Temperature for Actuator | ≤ 80℃ |
| Bake temperature | ≤ 150℃ |
| Material | SUS304、 AL6061 anodizing |
| Mounting position | Any |
| Operating pressure (N2) | 4～7kgf/cm2 |
