Features
HiScroll
・Industry-leading basic performance
・World-class quietness
(Also suitable for analytical equipment and research applications)
・Long maintenance cycle
・Customers can easily replace the tip seal
・Vacuum gauge is also available as standard
High-precision piezo Pirani vacuum gauge
Measurement range: 5×10-2Pa to 1.2×105Pa
Parameter changes and vacuum level monitoring are possible using OmniControl, etc.
Vacuum level control mode available
・Can be controlled together with turbomolecular pump/vacuum gauge
・Worldwide service
・World-class quietness
(Also suitable for analytical equipment and research applications)
・Long maintenance cycle
・Customers can easily replace the tip seal
・Vacuum gauge is also available as standard
High-precision piezo Pirani vacuum gauge
Measurement range: 5×10-2Pa to 1.2×105Pa
Parameter changes and vacuum level monitoring are possible using OmniControl, etc.
Vacuum level control mode available
・Can be controlled together with turbomolecular pump/vacuum gauge
・Worldwide service
