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Viewport Series

Vacuum components list

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View Port Series

Technical Data.


UHV KODIAL
HV KODIAL
View Port Seal
Metal skirt
Metal skirt / O-ring seal
Mounting seal
OFHC Gasket
Center Ring
Operate Pressure range
760 Torr ~ 1x10-10 Torr
1,000mbar ~ 1.33x10-10mbar
100 kPa ~1.13x10-11kPa
760 Torr ~ 1x10-8 Torr
1,000mbar ~ 1.33x10-8mbar
100 kPa ~1.13x10-9kPa
Leak rate
1x10-10Tor l/s, He
1.33x10-10mbar l/s, He
1.13x10-11kPa l/s, He
1x10-9Tor l/s, He
1.33x10-9mbar l/s, He
1.13x10-10kPa l/s, He
Temperature range
-20℃ ~ 350℃
-20℃ ~ 200℃
Bake temperature
300℃
150℃
Maximum temperature
change per minute
3℃
3℃
Body material
SS304L
SS304L
View port material
kodial
kodial

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