Transfer Valve (L-Motion)
Specification
| GATE SEAL TYPE | TRANSFER VALVE (L-MOTION) | Leak rate Stainless | < 1 × 10-9 mbar ℓ/sec |
|---|---|---|---|
| Operation | Pneumatic | Leak rate Aluminum | < 1 × 10-8mbar ℓ/sec |
| Flange Size (ID) Sealing | 32×222 / 46×236 / 50×336 / 56×496 | Cycles until First Service | ≥ 1,000,000 |
| Feedthrough | Welded Bellows | ≤ 200℃ | |
| Gate Seal | Viton O-ring / Vulcanized Seal | Temperature for Actuator | ≤ 50℃ |
| Bonnet Seal | Viton O-ring | Bake Temperature | ≤ 200℃ |
| Response Time | ≤ 2 Sec | Materials | Stainless Steel, Al6061 Anodizing |
| Operate Pressure Range | 1×10-6 mbar to mbar to 1200 mbar | Mounting Position | Any |
| Differential Pressure at Opening | ≤ 30mbar | Operating Pressure(N2) | 4 ~ 7bar |
| Differential Pressure on the Gate | ≤ 1200bar |
Transfer Valve (L-Motion) サイズ & 図面
詳細寸法 (図面等)：準備中です
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