Features
- Wide variety of models to choose from, so you can find the perfect fit for your needs
- Worldwide service
- Worldwide service
Active Line
- Wide measurement range (10-9 Pa to 5.5 x 106 Pa)
- Dedicated controller and eight types of probes (based on measurement principle) available.
- Unified gauge connector shape eliminates the need for multiple controllers.
- Up to 6 gauges can be connected to a single controller.
- Pressure units can be changed to Pa, Torr, or mba.
| Part No. | Name | Flange | Measurement range(Pa) | |
| Upper Limit | Lower Limit | |||
| TPR280 | Pirani gauge | NW16 ICF34 (CF16) | 1.0×105 | 5.0×10-2 |
| TPR281 | Corrosion-resistant Pirani gauge | |||
| TPR270 | Pirani gauge | NW16 ICF34 (CF16) | 1.0×105 | 1.0×10-2 |
| TPR271 | Corrosion-resistant Pirani gauge | 5.0×10-2 | ||
| PCR280 | Pirani & capacitance combination gauge | NW16 ICF34 (CF16) | 1.5×105 | 5.0×10-3 |
| IKR360 | Cold cathode gauge | NW25 NW40 ICF70 (CF35) | 1 | 1.0×10-7 |
| IKR361 | ||||
| IKR270 | 5.0×10-9 | |||
| PKR360 | Pirani & capacitance combination gauge | NW25 NW40 ICF70 (CF35) | 1.0×105 | 1.0×10-7 |
| PKR361 | ||||
| IMR265 | Process ion gauge | NW16 NW25 NW40 ICF34 (CF16) ICF70 (CF35) | 1.0×105 | 2.0×10-4 |
| PBR260 | Pirani & hot cathode combination gauge | NW25 NW40 ICF70 (CF35) | 1.0×105 | 5.0×10-8 |
We have a lineup of products other than those listed above, so please feel free to contact us.
Please contact us for detailed specifications.
Please contact us for detailed specifications.
Pump & vacuum gauge controller Omni Control series
| Name | Number of connections possible | Vacuum degree display format |
| Omni Control | 1～２ch | 2ch simultaneous possible |
Please contact us for details about the configuration.
